Two-dimensional growth of continuous Cu2O thin films by magnetron sputtering
نویسندگان
چکیده
We present results on the in situ, two-dimensional growth sas opposed to the more commonly encountered island-coalescence mechanismd of continuous epitaxial Cu2O films on MgOs011d using dc facing-magnetron sputtering from metallic Cu targets in an oxygen/argon atmosphere. Film growth was studied as a function of deposition time and the dc power applied to the guns. Control of the latter leads to either continuous or island-/rodlike film morphologies. © 2005 American Institute of Physics. fDOI: 10.1063/1.1861117g
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